FLOW RATE CONTROLLABLE METAL VAPOR SOURCE AND ION ANALYZER EQUIPPED WITH SUCH SOURCE

摘要

A metal vapor source with a regulatable flow rate comprising an enclosure filled with said vapor, means for heating said enclosure to a first temperature, a tube connected to the enclosure and means for heating said tube to a second regulatable temperature, the first temperature being maintained above the second temperature. An ion analyzer comprising an enclosure in which is disposed a target to be analyzed, a lens for extracting secondary ions whose front face faces the target, an enclosure filled with an alkaline vapor, means for heating said enclosure to a first regulatable temperature, a vapor outflow tube connected to one end of the enclosure, while the other end penetrates the analyzer enclosure, traverses the extraction lens and assumes a position level with the front face of the extraction lens and means for heating said tube to a second regulatable temperature, the first temperature being kept above the second temperature of the outflow tube.