INDUCTION HEATING TYPE EVAPORATION APPARATUS FOR ULTRAFINE PARTICLE

摘要

PURPOSE:To heat and evaporate evaporating material at an excellent power efficiency, by dividing the vacuum vessel of an induction heating type evaporation apparatus for ultrafine particles into two chambers, and by keeping one chamber where an induction heating coil is arranged at such a press. of the atmosphere that no electric discharge is produced. CONSTITUTION:A vacuum vessel 21 is divided into an upper chamber 24 and an under chamber 25 with a partitioning plate 23 which has an opening 22 and a stopper 26 therefor. A crucible 27 containing evaporating material 28 is projected from the upper chamber 24 to the under chamber 25 and is wound by an induction heating coil 23 which is installed in the under chamber 25. The stopper 26 is removed so that the upper and under chambers communicate with each other through the opening 22, then the vessel 21 is evacuated by way of an exhaust vent 30. Then the opening 22 is blocked with the stopper 26, and a gas such as Ar, He etc. are introduced through a gas inlet 29 into the upper chamber 24 to about 1 Torr. The induction heating coil 32 is energized in order to heat and evaporate the evaporating material 28 so as to deposit ultrafine particle film on the substrate 31. Because the under chamber is kept at a high vacuum, no electric discharge is produced, consequently the evaporation is performed at an excellent power efficiency.