Thin film circuit with integrated resistors - has low conductivity resistance film only on spots for resistive functions, with contact regions overlapping conductor path

摘要

The integrated resistors of poorly conductive film material are incorporated into the conductive track pattern on a non-conductive support. The resistance film is provided only at points (3), where they are functionally required. In order to form an electric connection of the respective resistor to a conductor, the support (1) incorporates slightly overlapping contact regions (4) for cooperation with the respective conductive track. Pref. the resistance film is made of nickel or its alloy. The surface resistance of the film may exceed 0.1 ohm per sq.cm. The conductor tracks may be formed by a galvanically deposited metal from the group Cu, Ag, Au, Pd, Rh, Re, Pt, or their alloys Typically the specific resistance of any metal, or its alloy, forming the conductive track pattern is smaller than 10 micro-ohms per cm. The resistance and conductive paths may be covered by a non-conductive film for protection.