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Process for growing a superficial dielectric structure upon a substrate, made of a chemical compound, comprising at least two elements
Process for growing a superficial dielectric structure upon a substrate, made of a chemical compound, comprising at least two elements
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机译:在包括至少两种元素的化合物制成的衬底上生长表面介电结构的方法
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摘要
In a process for producing a surface compound between a substrate and a reactive species a thin layer permeable to the species in question is deposited on the substrate. A particularly interesting case is the oxidation of a substrate of gallium arsenide, the thin layer being made from zirconia doped with lime.
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