Optical apparatus having a mirror and a mirror mounting stage

摘要

Optical apparatus has a mirror 2C and a mirror mounting stage 1. The stage 1 has a supporting portion 1c to which a part of the mirror 2C is affixed, leaving other parts of the mirror 2C free.;Buffer means are provided which comprise a mounting part 5a affixed to the mirror mounting stage 1, on which mounting part 5a a spring part 6a, with a spacer 7a, is provided. The spacer 7a of the buffer means contacts a free end 2C' of the mirror 2C. The spring part 6a is deformable so as to take up relative displacement between the free end of the mirror 2C and the mirror mounting stage 1, arising for example as a result of temperature change when the mirror and the mirror mounting stage have different coefficients of expansion.