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Semiconductor device of silicon on sapphire structure having FETs with different thickness polycrystalline silicon films
Semiconductor device of silicon on sapphire structure having FETs with different thickness polycrystalline silicon films
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机译:具有不同厚度的多晶硅膜的FET的蓝宝石硅结构的半导体器件
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摘要
A semiconductor device has a plurality of field effect transistors on an insulating substrate. A semiconductor film constituting at least one of the plurality of field effect transistors is thinner than a semiconductor film of the other field effect transistor or transistors.
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