METHOD AND APPARATUS FOR FORMING THIN FILM OXIDE LAYERS USING REACTIVE EVAPORATION TECHNIQUES

摘要

ABSTRACT OF THE DISCLOSUREApparatus and method for forming high quality thin filmoxide layers on a substrate by a reactive evaporationprocess utilizing an oxygen plasma activation source inthe form of a cylindrical boule of insulating materialsurrounded by a radio frequency coil for generatinga radio frequency electromagnetic field in the bouleof sufficient magnitude to create a self-igniting oxygenplasma within the boule without evaporating material fromthe walls thereof.