FORMING THIN FILM OXIDE LAYERS USING REACTIVE EVAPORATION TECHNIQUES

摘要

The disclosure relates to an apparatus and method for forming high quality thin film oxide layers on a substrate by a reactive evaporation process utilizing an oxygen plasma activation source in the form of a cylindrical boule (17) of insulating material surrounded by a radio frequency coil (18) for generating a radio frequency electromagnetic field in the boule of sufficient magnitude to create a self-igniting oxygen plasma within the boule without evaporating material from the walls thereof.