Process and device for the production of high purity gas by the vaporisation of a cryogenic liquid

摘要

The reservoir (1) contains at its lower part a purifying container (1) which itself contains a bell tray (9) communicating with the reservoir and provided with a weir (12), which opens into a bath at constant level. . When gas is drawn from the top of the scrubber, liquid taken from the lower bath is vaporized in an external vaporizer (3), and the gas produced passes successively through the two baths. It is thus possible to obtain the high purity gases, free of dust, which are required for certain applications, in particular in the electronic components industry.