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PROCESS FOR CHARACTERISING THE RELIABILITY BEHAVIOUR OF BIPOLAR SEMICONDUCTOR DEVICES

机译:表征双极性半导体器件可靠性行为的过程

摘要

1. A method of determining the time-to-fail T of chips having an epitaxial layer and integrating bipolar semiconductor devices likely to have defects resulting from instabilities in the passivation oxide layer of said devices, and at least one IGFET type test structure, which are produced on a manufacturing line, and more particularly, of determining the corresponding burn-in time T50 necessary for 50% chips to be made deficient, characterized in that it includes the steps of : - previous elaboration of the manufacturing line which consists in : selecting a plurality of chip batches produced on the manufacturing line ; computing for each batch from the test structure, coefficients Nss (interface charge density), Neff (equivalent passivation oxide charge) and ND (impurity concentration in the epitaxial layer) ; calculating, for each batch, the value of a reliability function R defined as being equal to the product Nss Neff ND **1/2 and determining for each batch the time-to-fail T such as, for instance, the corresponding time T50 ; plotting curve R=f(T), R=f(T50 ), for instance, the characteristic of the manufacturing line, and - determining the time-to-fail time T of any chip produced on said manufacturing line, which consists in : computing the previously defined coefficients Nss , Neff and ND on the test structure of said chip ; calculating the value of the reliability function R for said chip, and determining the time-to-fail T, T50 , for instance, corresponding to said value through a direct reading of the corresponding value on the previously plotted curve R=f(T).
机译:1.一种确定具有外延层的芯片的失效时间T并集成可能具有由所述器件的钝化氧化物层的不稳定性导致的缺陷的双极半导体器件的方法,以及至少一个IGFET型测试结构,在生产线上进行生产,并且更具体地,确定使50%的芯片变得不足所必需的相应的预烧时间T50,其特征在于,该步骤包括以下步骤:-对该生产线进行预先设计,包括:选择生产线上生产的多个芯片批次;从测试结构为每批计算系数Nss(界面电荷密度),Neff(等效钝化氧化物电荷)和ND(外延层中的杂质浓度);对于每个批次,计算可靠性函数R的值,该值定义为等于乘积Nss Neff ND ** 1/2,并为每个批次确定失效时间T,例如相应的时间T50 ;绘制曲线R = f(T),R = f(T50),例如,生产线的特性,以及-确定在所述生产线上生产的任何芯片的失效时间T,其包括:在所述芯片的测试结构上计算先前定义的系数Nss,Neff和ND;计算所述芯片的可靠性函数R的值,并通过直接读取先前绘制的曲线R = f(T)上的对应值来确定对应于所述值的故障时间T,例如T50 。

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