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The device and method for measuring the deformations of the wave surface introduced by an optical system

机译:测量光学系统引入的波面变形的装置和方法

摘要

Coherent light from a source (2) is divided by a separator cube (6) into a reference beam (8) and a measuring beam (10) which is reflected by a mirror (14). The two beams intersect in a Bragg cell (12) which is excited by a RF generator (16). The reference and diffracted measuring beams are directed by a lens (20) to the optical system (18) under test. Sinusoidal interference fringes formed at a slit (22) are translated at a uniform rate and detected by e.g. a photomultiplier (24). Wavefront distortion introduced by the optical system (18) is indicated by the phase of the photomultiplier output, which is compared (26) with the phase of the RF generator (16).
机译:来自光源(2)的相干光被分离器立方体(6)分成参考光束(8)和被反射镜(14)反射的测量光束(10)。两条光束在布拉格单元(12)中相交,布拉格单元(12)由RF发生器(16)激发。基准和衍射测量光束由透镜(20)引导至被测光学系统(18)。形成在狭缝(22)上的正弦干涉条纹以均匀的速率平移并通过例如激光束检测。光电倍增管(24)。由光学系统(18)引入的波前畸变由光电倍增管输出的相位指示,将其与射频发生器(16)的相位进行比较(26)。

著录项

  • 公开/公告号FR2526161B2

    专利类型

  • 公开/公告日1985-12-27

    原文格式PDF

  • 申请/专利权人 COMMISSARIAT A ENERGIE ATOMIQUE;

    申请/专利号FR19820007645

  • 发明设计人 BERNARD PICARD;

    申请日1982-05-03

  • 分类号G01J9/00;

  • 国家 FR

  • 入库时间 2022-08-22 07:31:28

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