MANUFACTURE OF HYDROGENATED AMORPHOUS SILICON CARBON FILM

摘要

PURPOSE:To obtain a good-quality film by accelerating a generating speed of a hydrogenated amorphous silicon carbon film and sufficiently developing a three-dimentional network structure in said film by utilizing photolysis of carbene which is an unstable intermediate containing divalent carbon atoms. CONSTITUTION:Diazomethane introduced into a gas passage 14 is subjected to photolysis by irradiation with the ultraviolet rays from an ultraviolet ray source 15. Produced CH2 carbene flows into an internal space 22 through a second inlet 13. The CH2 is supplied onto a substrate 16 together with disilane flowing into the internal space 22 through a first inlet 12. Then, it is subjected to photolysis by irradiation of the beams from an excitation ultraviolet ray source 19. This photolysis produces silicon and carbon radicals, which are deposited on a surface of the substrate 16 to rapidly form a film of hydrogenated amorphous silicon carbon.