PURPOSE:To automate transfer, attachment and removal of a probe card, by providing a locking mechanism for engaging and disengaging the probe card and a connector, and providing a lifting means, which transfers the probe card and moves the probe card upward, on a chuck. CONSTITUTION:A loader part 1 picks up a probe card 8 from a cassette and mounts it on a chuck 6 of a prober part 2 by using a handling arm and the like. When a material which is mounted on the chuck 6 is the probe card 8, alignment is not carried out. The chuck 6 is driven with an X-Y stage. The probe card 8 is transferred to a part directly beneath a connector 11. Then, pins 19 of the chuck 6 are protruded, and the probe card 8 is brought close to the connector 11. Thereafter, the entire chuck 6 is lifted, and the probe card 8 is contacted with the connector 11. In this state, a locking ring 16 is rotated, and a protruding part 16a is engaged with the groove of a locking part 14 of the probe card 8. Thus the probe card 8 is fixed to the connector 11.
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