DIETHYLBERYLLIUM DOPANT SOURCE FOR MOCVD GROWN EPITAXIAL SEMICONDUCTOR LAYERS
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机译:用于MOCVD生长的表皮半导体层的二乙基铍掺杂剂源
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摘要
metal organic compound of transport for the growth of the epitaxial layers doped with bérylium easily reproducible.in a system of mocvd reactor is a process involving the deposition of a layer of epit
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