PROCESS FOR MANUFACTURING AN ELECTRICAL RESISTOR HAVING A POLYCRYSTALLINE SEMICONDUCTOR MATERIAL, AND INTEGRATED CIRCUIT DEVICE COMPRISING THIS RESISTOR

摘要

1. Process for manufacturing a resistor (11) by implantation of electrically inactive ions in an area of a polycrystalline semiconductor material (17b) doped with a strong dose of electrically active ions, characterised in that the electrically inactive ions belong to the family of rare gases.