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Evaporator for vacuum deposition of films - has means for forming directed flow of deposition material vapour from crucible up to substrate
Evaporator for vacuum deposition of films - has means for forming directed flow of deposition material vapour from crucible up to substrate
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机译:用于薄膜真空沉积的蒸发器-具有用于形成沉积材料蒸气从坩埚到基底的定向流的装置
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摘要
The evaporator consists of a crucible for the deposition material equipped with a heater and connected with a pipe to produce an updraught. The pipe has a transverse symmetry plane and has one end fitted in the crucible. It directs the flow of vapour to a substrate.
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