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Monolithic integrated semiconductor device of semiconductor laser and optical waveguide
Monolithic integrated semiconductor device of semiconductor laser and optical waveguide
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机译:半导体激光器和光波导的单片集成半导体器件
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摘要
A semiconductor device which includes a semiconductor substrate, an active layer in a quantum well structure disposed on said semiconductor substrate, an optical waveguide formed by a disordering part of said active layer, and a clad layer disposed on said active layer and optical waveguide. As a result of this structure, the coupling efficiency of the active layer and optical waveguide is extremely enhanced, and a high performance semiconductor device is obtained.
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