METHOD AND DEVICE FOR CLEANING BOTH SIDES OF SUBSTRATE USING ULTRASONIC CLEANING SPRAY NOZZLE

摘要

PURPOSE:To enable foreign contaminative objects adheres to the surface of a substrate to be cleaned to be removed efficiently by centrally spraying cleaning liquid, where ultrasonic vibration is propagated with a sharp angle to a substrate surface against the direction of revolution, to both sides of the substrate while rotating the substrate to be cleaned. CONSTITUTION:Supporting means for supporting a substrate to be cleaned 1 with at least three fixing tools 3 so that they can rotate, means where at least one ultrasonic cleaning spray nozzle 5 is opposed to both surfaces of the substrate 1 with a sharp slope to the rotary surface of the substrate 1, and means for scanning a ultrasonic cleaning spray nozzle 5 in radius direction of the rotary substrate are provided. Then, the plate-like substrate to be cleaned 1 is rotated and washing liquid is centrally sprayed while rotating it in radius direction of the rotary central axis of the substrate. It allows contaminated foreign objects on both surfaces of the substrate to be cleaned to be eliminated simultaneously in a short time and with improved efficiency.