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DIFFERENTIAL PRESSURE TYPE FLOW RATE TRANSDUCER

机译:差压式流量传感器

摘要

PURPOSE:To obtain a differential pressure type flow rate transducer, which can detect a flow rate highly accurately, by transducing differential pressure determined by the flow rate, into an electric signal through electrostatic capacitors, and correcting the signal with temperature pressure. CONSTITUTION:In a differential capacitance sensor 20, electrodes 21 and 22 are provided so as to face each other with respect to a moving electrode 23. The space between the electrodes is filled with sealed liquid 25. Electrostatic capacitances C1 and C2, which are differentially changed with differential pressure that is yielded by the detected flow rates, are formed. A liquid temperature sensor 26 detects the temperature of the sealed liquid 25. A temperature sensor 27 detects the temperature of fluid. An operating part 28 comprising a CPU 38 and the like operates the difference between the sums of the capacitances C1 and C2 and outputs a signal corresponding to said differentials pressure. Then, the product of the sums is operated. A signal corresponding to the dielectric constant of the sealed liquid 25 is outputted. Static pressure, which is applied to the sealed liquid 25, is computed based on the dielectric constant signal and the liquid temperature signal Td. The effects of the differential pressure of said differential pressure signal and the temperature signal Tf are corrected based on the signal corresponding to the static pressure and the signal Td. Then the temperature pressure is corrected with the signal Tf and the static pressure signal and standard temperature and standard static pressure. The result is multiplied by a flow rate coefficient, and a flow rate signal is obtained.
机译:目的:获得一种压差式流量传感器,通过将由流量确定的压差转换为通过静电电容器的电信号,并用温度压力进行校正,从而可以高精度地检测流量。构成:在差分电容传感器20中,电极21和22相对于移动的电极23彼此面对。电极之间的空间充满了密封液体25。静电电容C1和C2是差分的。随检测到的流量产生的压差变化。液体温度传感器26检测密封液体25的温度。温度传感器27检测流体的温度。包括CPU 38等的操作部28操作电容C1和C2之和之间的差,并输出与所述压差相对应的信号。然后,求和。输出与密封液25的介电常数相对应的信号。基于介电常数信号和液体温度信号Td来计算施加到密封液体25的静压力。基于与静压和信号Td相对应的信号来校正所述压差信号和温度信号Tf的压差的影响。然后用信号Tf和静压力信号以及标准温度和标准静压力校正温度压力。将结果乘以流量系数,并获得流量信号。

著录项

  • 公开/公告号JPH01158316A

    专利类型

  • 公开/公告日1989-06-21

    原文格式PDF

  • 申请/专利权人 YOKOGAWA ELECTRIC CORP;

    申请/专利号JP19870318191

  • 发明设计人 KIMURA ATSUSHI;KAYAMA NAGAOKI;

    申请日1987-12-16

  • 分类号G01F1/34;

  • 国家 JP

  • 入库时间 2022-08-22 06:46:54

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