A BATCH FABRICATED THIN FILM PLATINUM RESISTANCE THERMOMETER

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  机译： 批生产的薄膜铂电阻温度计

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  机译： 批生产的薄膜铂电阻温度计

• 5. Platinum thin film resistor for resistance thermometers - where film is deposited on substrate by sputtering in inexpensive gas mixt. of krypton and xenon [P] . 德国专利： DE2936013A1 . 1981-03-19

  机译： 用于电阻温度计的铂薄膜电阻器-在廉价的气体混合物中通过溅射将薄膜沉积在基板上。 k和氙

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