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THERMOSTABLE POLYMER SYSTEM, CROSS-LINKABLE BY IRRADIATION, FOR MICROELECTRONIC USE

机译:可通过辐射交联的热固性聚合物体系,用于微电子用途

摘要

Linear fluorooligomers having at least two reactive end groups per polymer molecule are incorporated into radiation sensitive polymer systems which have improved continuous temperature resistance and low dielectric constant. The polymer systems can be applied as lacquers. Preferably perfluorated poly-ethers and perfluorated alkanes are used as starting compounds. The polymeric product is usable as a coating for the production of printed multi-layer wirings and economises on through-bores and additional copper intermeidate layers. A further field of application exists in the field of integrated semiconductor ciruits in VLSI-technology for the production of negative photo-resists.
机译:每个聚合物分子具有至少两个反应性端基的线性氟代低聚物被掺入辐射敏感性聚合物体系中,该体系具有改善的连续耐温性和低介电常数。聚合物体系可以用作漆。优选将全氟聚醚和全氟烷烃用作起始化合物。该聚合物产品可用作涂料,用于生产印刷的多层线路,并节省通孔和附加的中间金属铜层的成本。进一步的应用领域存在于用于生产负性光刻胶的VLSI技术中的集成半导体电路领域。

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