MICROWAVE LEADING-IN PART OF MICROWAVE RESPONSE DEVICE BUILT-IN VACUUM DEVICE

摘要

PURPOSE:To easily execute an alignment of a first waveguide to a waveguide path and a second waveguide by providing a bellows for covering the periphery of a second waveguide and a close-up plate position adjusting device and giving flexibility to a second waveguide and a close-up plate side. CONSTITUTION:An alignment to a waveguide path 16 of a first waveguide 17 and a second waveguide 20 is executed by attaching a second waveguide 20 to a close-up plate 14, and also, attaching a bellows 27 between the close-up plate 14 and a vacuum vessel 12, and thereafter, adjusting plural adjusting screws 30 and moving the close-up plate 14. In this case, by the bellows 27 and a close-up plate position adjusting device 28, flexibility is given to a second waveguide 20 and the close-up plate 14 side, as well. In such a way, the alignment to the waveguide path 16 of a first waveguide 17 and a second waveguide 20 can be executed easily with a large degree of freedom.