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NOVOLAK RESIN, RADIATION-SENSITIVE POSITIVE PHOTORESIST, AND METHOD FOR FORMING RESIST PATTERN
NOVOLAK RESIN, RADIATION-SENSITIVE POSITIVE PHOTORESIST, AND METHOD FOR FORMING RESIST PATTERN
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机译:酚醛清漆树脂,辐射敏感正性光致抗蚀剂及其形成图案的方法
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摘要
Novolak resins are provided which are the condensation product of (a) a phenol, phenol derivative, or mixtures thereof, and (b) a mixture of formaldehyde or a formaldehyde precursor and an aromatic aldehyde. When the aromatic aldehyde is a monohydroxy aromatic aldehyde, the novolak resin is especially useful in positive photoresist formulations in combination with a photosensitizer such as a naphthoquinone sensitizer.
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