SORPTION OF GASEOUS COMPOUNDS OF GROUPS II-VII ELEMENTS

摘要

Scavenger compositions have utility for effecting the sorptive removal of hazardous gases containing Group II-VII elements of the Periodic Table, such as are widely encountered in the manufacture of semiconducting materials and semiconducter devices. Gas sorption processes include contacting of Group II-VII gaseous compounds with these scavenger compositions, gas contacting apparatus (400) include mesh structures (406) containing these scavenger compositions, to prevent solids from being introduced to or discharged from the contacting vessel (400) in the gas stream undergoing treatment. A reticulate heat transfer structure (402) dampens localized exothermic reaction fronts when gas mixtures comprising Group II-VII constituents are contacted with the scavenger compositions in bulk sorption contacting vessels (400) according to the invention.