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Method of forming on a surface of a moving substrate a layer, and vacuum evaporation apparatus for forming vapor deposited layers
Method of forming on a surface of a moving substrate a layer, and vacuum evaporation apparatus for forming vapor deposited layers
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机译:在移动基板的表面上形成层的方法以及用于形成气相沉积层的真空蒸发设备
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摘要
The thickness distribution of a vapor deposited layer such as an interference filter having deposited on a moving substrate (63) such as a glass faceplate for a projection television tube, is controlled along an axis in the direction of travel of the substrate by employing at least one rotatable dodger (64) to partially shield the substrate as it passes behind the dodger during deposition.
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