ANALYZING METHOD OF MULTIPLE-ELEMENT COMPOUND IN X-RAY MICROANALYSIS

摘要

PURPOSE:To obtain the number of compounds of both elements and the rates of contents of both elements readily and accurately by selecting two kinds of incorporated elements, and plotting a first correlation diagram of the values of image luminance based on the histograms of the values of the luminances of both images obtained from the measured results of the characteristic X rays of both elements. CONSTITUTION:Two kinds of incorporated elements (first and second elements) are selected. A first correlation diagram of the values of image luminances associated with both element is plotted based on the histograms of the values of the images of luminances of both images obtained by the measured result of the characteristics of both elements. In this way, the number of compounds containing both elements and the rates of contents of both elements can be obtained readily and accurately based on the number of the data groups and each position. The data group wherein the rates of contents of both elements become constant is converted into a first histogram of the luminance values image. A second correlation diagram of the luminance values of images of three elements is plotted based on said histogram and the histograms of the image luminances of other kinds of elements (second,... nth elements). This procesure is repeated, and the final (m-1)th coorelation diagram of image luminance is obtained.