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MULTI-CATHODE METAL VAPOR ARC ION SOURCE
MULTI-CATHODE METAL VAPOR ARC ION SOURCE
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机译:多阴极金属蒸气弧离子源
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摘要
An ion generating apparatus utilizing a vacuum chamber, a plurality of cathode (250) located on a movable portion of a support member and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam.
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