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Brief description of embodiments of an alternation of layers of monocrystalline semiconductor material and layers of insulating material

机译:对单晶半导体材料层和绝缘材料层的交替实施例的简要说明

摘要

Method of producing a layer of a monocrystalline semiconductor material on a layer of insulating material 20, 21. For this purpose, it is an epitaxial growth, in a cavity 30 closed by the layers of dielectric material 20, 40, 41, from seeds 38, 39 of monocrystalline semiconductor material 38, 39 of a substrate. / p & & p & this process thus makes it possible to integrate in three dimensions of the semiconductor components.
机译:在绝缘材料20、21的层上生产单晶半导体材料的层的方法。为此,它是外延生长,在空腔30中由籽晶38封闭,该空腔被介电材料20、40、41的层封闭衬底39的单晶半导体材料38、39。 & &因此,该工艺使得可以在三个维度上集成半导体部件。

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