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Brief description of embodiments of an alternation of layers of monocrystalline semiconductor material and layers of insulating material
Brief description of embodiments of an alternation of layers of monocrystalline semiconductor material and layers of insulating material
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机译:对单晶半导体材料层和绝缘材料层的交替实施例的简要说明
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摘要
Method of producing a layer of a monocrystalline semiconductor material on a layer of insulating material 20. For this purpose, it is an epitaxial growth, in a cavity 30 closed by the layers of dielectric material 20, 40, on the basis of a seed 38 of monocrystalline semiconductor material 38 of a substrate. Growth takes place first of all vertically, perpendicularly to the seed 38, and then horizontally in the plane of the cavity 30. / p & & p & this process thus makes it possible to integrate in three dimensions of the semiconductor components.
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