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Brief description of embodiments of an alternation of layers of monocrystalline semiconductor material and layers of insulating material

机译:对单晶半导体材料层和绝缘材料层的交替实施例的简要说明

摘要

Method of producing a layer of a monocrystalline semiconductor material on a layer of insulating material 20. For this purpose, it is an epitaxial growth, in a cavity 30 closed by the layers of dielectric material 20, 40, on the basis of a seed 38 of monocrystalline semiconductor material 38 of a substrate. Growth takes place first of all vertically, perpendicularly to the seed 38, and then horizontally in the plane of the cavity 30. / p & & p & this process thus makes it possible to integrate in three dimensions of the semiconductor components.
机译:在绝缘材料层20上制造单晶半导体材料层的方法。为此,它是在由种子材料38为基础的,由介电材料层20、40封闭的空腔30中的外延生长。衬底的单晶半导体材料38的制造。首先,垂直于种子38垂直地生长,然后在空腔30的平面中水平地生长。 & &因此,该工艺使得可以在三个维度上集成半导体部件。

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