CONTINUOUS VACUUM FILM FORMING DEVICE TO SURFACE OF LARGE QUANTITY SPHERICAL BODIES

摘要

PURPOSE:To improve productivity by moving a large quantity of spherical bodies while individually and successively rolling the spherical bodies in the specified route in a vacuum treating vessel and subjecting the spherical bodies to a prescribed vacuum film treatment during the time when the spherical bodies stagnate in the chamber, thereby the thin film forming treatment of the large quantity of spherical bodies is efficiently executed in time. CONSTITUTION:Evaporating sources 3, 3 of an arc ion plating system are disposed in the upper part and lower part in the vacuum treating vessel 1. An inlet 6 of the size at which the spherical body 5 for one piece passes is formed at one end of the vacuum treating vessel 1 and an outlet 7 is bored at the other end. An orbit 8 of a gentle down grade (theta) is connected from the inlet 6 to the outlet 7. This orbit 8 is constituted of two pieces of rails 8', 8' as the long stroke of a zigzag plane type and is formed to the narrow width gage enough to allow one piece of the spherical body 5 to ride across these rails. While the spherical bodies 5 from the inlet 6 roll on the orbit 8, the spherical bodies move and are subjected to the thin film forming treatment by the ion current (beta) from an evaporating source in the arc coating region between (alpha to alpha).