Continuous Belt Air to Vacuum to Air (AVA) Processing of Thin Films and Devices

摘要

Thin film devices add an estimated USD87 billion to the economy annually [1]. In order to understand the requirements of increased throughput and to study the basic research issues concerning the producibility and productivity of thin film devices, a unique manufacturing research system has been developed and tested in our laboratory. This system allows the continuous transport of 3 x 3 inch substrates from Air into Vacuum where they can undergo thin film processing and then back to Air (AVA). In our laboratory, the AVA system has been used for research into processing of thin films, CdTe semiconductor photovoltaics (PV) and printed circuit boards (PCBs). Improvements in manufacturing efficiency, process control and throughput are critical needs for the vacuum manufacturing industry [2]. These are ongoing areas of study utilizing the AVA system. Our research focus involves improving the manufacturing robustness and throughput while reducing the environmental impact of thin film PV and printed circuit board (PCB) production.