ATMOSPHARE STRUCTURE OF WIRE BONDER

摘要

PURPOSE:To improve bonding rate, maintain constant bonding quality and almost unnecessitate adjustment of flow rate of oxidation preventing gas. CONSTITUTION:Hollow portions 10, 10 which are opened along a work transfer direction are formed in the direction of work 5 between transfer rails 2, 2 and an atmosphare cover 9. The transfer rails 2, 2 are provided with through holes 14, 14 connected with hollow portions 10, 10. The home position of a bonding head 19 is approximated with the bonding surface of a work 5. On the other hand, the oxidation preventing gas supplied from the through holes 14, 14 is sprayed to the atmosphare cover 9 lowering its rate and is then blown out like a curtain in the direction of work 5.