MANUFACTURE OF RESISTOR FOR JOSEPHSON INTEGRATED CIRCUIT

摘要

PURPOSE:To eliminate contact resistance between the wiring layer and a resistor layer as well as to enable the resistor layer to be formed into a predetermined shape with a high precision in a simplified process by continuously growing on the resistor layer a superconducting layer which is not attacked by the same etching gas, forming a superconducting wiring layer in part of the superconducting layer, and using materials of different etch rates for the superconducting wiring layer and the resistor layer. CONSTITUTION:On a semiconducting substrate 11 having an insulating film 12 thereon, a resistor layer 13 and a superconducting layer 14 having an etch rate different from the resistor layer 13 are continuously formed and stacked. Then, on the superconducting layer 14 a resist film 15 of a predetermined pattern is formed, and with this as a mask the superconducting layer 14 and the resistor layer 13 are etched into a predetermined pattern. Next, after removing the resist film 15, a superconducting layer 16 for wiring is deposited and formed on the superconducting layer 14 and the resistor layer 13. Subsequently, on the superconducting layer 16 a resist film 17 of a predetermined pattern is formed, and with this as a mask the superconducting layer 16 and the superconducting layer 14 thereunder are etched, thereby forming the resistor layer 13 connected to the superconducting layer 16.