RESISTOR FOR JOSEPHSON INTEGRATED CIRCUIT AND ITS MANUFACTURE

摘要

PURPOSE: To obtain a means for preventing increase of contact resistance between a resistor and a superconductor film without necessitating a protective film for the resistor. ;CONSTITUTION: A resistor pattern on an insulating film 1 is constituted of transition metal 2 acting as an etching stopper when the pattern of a superconductor film 5 is formed. At the connection part of the transition metal 2 and the superconductor film 5, the transition metal 2 is connected with the superconductor film 5 via transition metal nitride 3.;COPYRIGHT: (C)1993,JPO&Japio