An apparatus for drying substrates by means of centrifugal force. Air is introduced into a drying chamber from the top end thereof. A rotary member is provided in the drying chamber, on which is mounted a cassette in which a plurality of substrates to be dried are stored. An auxiliary chamber is disposed at the bottom part of the drying chamber, within which fan blades are provided. An auxiliary exhausting duct is connected to the auxiliary chamber, whereby fine particles of dust produced around the bearing are completely exhausted.
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