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Optimal Design of High-Frequency Induction Heating Apparatus for Wafer Cleaning Equipment Using Superheated Steam

机译：用过热蒸汽进行晶圆清洁设备高频感应加热装置的最优设计

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Sang Min Park; Eunsu Jang; Joon Sung Park; Jin-Hong Kim; Jun-Hyuk Choi; Byoung Kuk Lee;
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年度 2020
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1. Optimum design of pipe bending based on high-frequency induction heating using dynamic reverse moment [J] . Hyun-Woo Lee, Jun-Ho Bae, Moon-Saeng Kim, International Journal of Precision Engineering and Manufacturing . 2011,第6期

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2. Optimum Design of Pipe Bending Based on High-Frequency Induction Heating Using Dynamic Reverse Moment [J] . Hyun-Woo Lee, Jun-Ho Bae, Moon-Saeng Kim, International Journal of Precision Engineering and Manufacturing . 2011,第6期

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3. Optimal design of induction heating equipment for high-speed processing of a semiconductor [J] . Yoshifumi Okamoto, Toshio Imai, Daisuke Miyagi, Compel . 2004,第4期

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4. Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems [C] . Eunsu Jang, Sang Min Park, Byoung Kuk Lee IEEE Applied Power Electronics Conference and Exposition . 2020

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5. Induction heating model for high-frequency induction joining and repair of complex-shape graphite fiber/polymer matrix composites. [D] . Lin, Wendy Wen-Ling. 1993

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6. Contactless steam generation and superheating under one sun illumination [O] . Thomas A. Cooper, Seyed H. Zandavi, George W. Ni, -1

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7. Design of equipment for steam generation and superheating [O] . Jakeš Martin 2010

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Optimal Design of High-Frequency Induction Heating Apparatus for Wafer Cleaning Equipment Using Superheated Steam

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