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MOSFET with improved properties - has 1st conductivity substrate, convex channel region, gate on channel region and 2nd conductivity source and drain regions

机译:具有改进性能的MOSFET-具有第一导电衬底,凸沟道区域,沟道上的栅极区域和第二导电源极和漏极区域

摘要

The MOSFET comprises: (1) a substrate (11) of a first conductivity type; (2) a convex channel region formed on the substrate (11); (3) a gate formed on the channel region and substantially covering it; (4) source and drain regions (13,13a) of a second conductivity type with a low concn., which are each formed in opposite parts of the sides of the channel region; and (5) source and drain regions (16,16a) of the second conductivity type, with a high concn., which are formed in the parts of the substrate (11) which are each disposed outside the opposite parts of the sides of the gate (15) and in the vicinity of the surface of the substrate.
机译:该MOSFET包括:(1)第一导电类型的衬底(11);以及(2)形成在基板(11)上的凸状的沟道区域。 (3)形成在沟道区上并基本上覆盖它的栅极; (4)具有低浓度的第二导电类型的源极和漏极区(13,13a),分别形成在沟道区的侧面的相对部分中;以及(5)具有高浓度的第二导电类型的源极和漏极区域(16,16a)形成在衬底(11)的部分中,所述部分分别设置在衬底的侧面的相对部分的外侧。栅(15)和衬底表面附近。

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