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Method of pretreatment for the high-deposition-rate production of fluorine-doped tin-oxide coatings having reduced bulk resistivities and emissivities
Method of pretreatment for the high-deposition-rate production of fluorine-doped tin-oxide coatings having reduced bulk resistivities and emissivities
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机译:用于高沉积率生产体积电阻率和发射率降低的掺氟氧化锡涂层的预处理方法
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摘要
A method for producing coatings on a heated substrate, preferably glass, comprises pretreating the substrate with a gaseous composition of water, air and a fluorine compound, and thereafter depositing a fluorine- doped tin-oxide coating on the substrate.
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