PROBE FOR INSTRUMENTATION OF SEMICONDUCTOR DEVICE

摘要

PURPOSE:To perform correct electrical measurement, by moving electrodes of probe elements vertically within cylindrical insulators for removing foreign substances adhered on electrodes of probe elements. CONSTITUTION:Cylindrical insulators 4 and 5 are fixed to a substrate 1 by support rods 7 and 8 such that they surround cylindrically electrodes 10 and 11 at the tip ends of probe elements 2 and 3. These cylindrical insulators 4 and 5 are provided for the purpose of removing dust or other contaminants from the electrodes. When a probe card 1 is brought close to a die A, any contaminant 6 adhered on the side faces of the tip ends of the elements 3 is caused to fall down onto the die A by the end of the insulator 5. In this manner, electrical measurements can be performed correctly.