FORMATION OF PHOTOCONDUCTIVE FILM MADE OF MAINLY AMORPHOUS SELENIUM

摘要

PURPOSE: To improve highlighted beam sizing characteristic by depositing a photoconductive film material composed of mainly amorphous selenium on a target portion of an image pickup tube in an atmosphere containing alcohol. ;CONSTITUTION: A transparent electrode 12 and an N-type conductive film 14 are formed on a glass substrate 10. After the inner wall of a depositing device is wiped with cloth moist with ethanol, a pressure of the depositing device containing the glass substrate 10 therein is decreased, thereby obtaining an ethanol atmosphere inside the device. A photoconductive film material is deposited on the N-type conductive film 14 by a predetermined method, thus forming a photoconductive film 16. A beam landing auxiliary film 18 is formed on the photoconductive film 16. Consequently, an electron trap due to tellurium and arsenic which are added into amorphous selenium can be reduced so as to decrease a highlighted beam sizing level and shorten an extinguishing time.;COPYRIGHT: (C)1993,JPO&Japio