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Josephson - device, consisting of a josephson - by means of gear structure, which is suitable for a superconductor.

机译:约瑟夫森-一种由约瑟夫森组成的装置-通过齿轮结构构成,适用于超导体。

摘要

PURPOSE:To form a Josephson junction at a designated position with excellent reproducibility, by forming crystal discontinuity part arranged on a crystal substrate or a crystal film, a superconductor film grown on the crystal substrate or the crystal film, and grain boundary in the superconductor film on the crystal discontinuity part. CONSTITUTION:By focused ion beam method, gold ions are implanted in a part of strontium titanate substrate 1 where a Josephson element is to be formed. As the result of gold ion implantation, crystal structure of a part of the strontium titanate substrate is destroyed, and a discontinuity part of crystal is formed. By heating the strontium titanate substrate 1, and vapor-depositing yttrium barium copper oxide, superconductor electrodes 3, 4 are formed. Crystal orientation of film of the superconductor electrodes 3, 4 coincides with that of the strontium titanate base substrate, and C-axis becomes perpendicular to the surface. On the boundary of the superconductor 3, 4, crystal grain boundary 5 is formed at the upper position of the discontinuity part of the base. Then the electrodes are worked in desired forms, and necessary wiring is made up.
机译:目的:通过在晶体基板或晶体膜上形成排列的不连续部分,在晶体基板或晶体膜上生长的超导体膜以及超导体膜中的晶界,从而在指定位置形成约瑟夫逊结,并且再现性优异。在晶体不连续部分。组成:采用聚焦离子束法,将金离子注入钛酸锶基底1的一部分,形成约瑟夫森元件。作为金离子注入的结果,破坏了钛酸锶锶衬底的一部分的晶体结构,并且形成了晶体的不连续部分。通过加热钛酸锶基板1和蒸镀钇钡铜氧化物,形成超导电极3、4。超导电极3、4的膜的晶体取向与钛酸锶基础基板的膜的晶体取向一致,并且C轴变得垂直于表面。在超导体3、4的边界上,在基底的不连续部分的上部位置处形成晶粒边界5。然后以所需的形式加工电极,并完成必要的布线。

著录项

  • 公开/公告号DE3878884T2

    专利类型

  • 公开/公告日1993-06-17

    原文格式PDF

  • 申请/专利权人 NIPPON ELECTRIC CO JP;

    申请/专利号DE19883878884T

  • 发明设计人 WADA YOSHIFUSA JP;

    申请日1988-12-16

  • 分类号H01L39/22;H01L39/24;

  • 国家 DE

  • 入库时间 2022-08-22 05:02:00

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