Speckle-shearing interferometer process for surface deformation measurement

摘要

The interferometer process involves using a coherent light source illuminating an examined surface and a dual beam interferometer for imaging the surface on to the image sensor of a video camera using 2 mirrors and a beam splitter (3). Hollow mirrors (6,8) with the same focal width are used, with setting screws (13,14) providing longitudinal and transverse adjustment.A piezo-translator (12) allows one of the hollow mirrors to be adjusted along the main axis of the corresponding interferometer arm. The focal width of the hollow mirrors allows their positioning directly behind the beam splitter.