Measurement for both vibration and deformation of microsurface by Fizeau interferometer of composite self-focus rod sensor

摘要

Abstract: By using composite self-focus rod, LD-pumped frequency doubling Nd:YVO$-4$/ laser and 3D fine regulation stand, a new Fizeau-type interferometer is developed. It can apply to measuring the micro-vibration and deformation of micro- surface at the same time. The theoretical analysis and the experimental results for the interferometer of self-focus sensor are given. !5