single crystals of the crystal orientation (LiTaO ₃ Orientation Flat) decision method

摘要

this invention is a method to use the chalk to be the direction x of LiTaO 3 single crystal ingot by the processing of the wafer, the elastic surface wave have a certain range of the datum to the datum of the wafer to determine the impact of is applied in accordance with the schedule. look for the direction of the cleavage plane is the standard x, y, z direction of the decision to allow a LiTaO 3 single crystals in the crystallization method, as a duet. in the technology process is compared with the processing of the wafer process number of the ub2e8ucd95uc2dc products. improve. the x, y, z direction of the decision, the case for the main direction of a cleavage plane and the recovery rate of the product is beautiful.