Lever device for easy replacement of cathodic sputtering device target - tightens the target unit to the cathode body and releases it to enable rapid target change

摘要

A lever device (1) for tightening the target (4) of a cathode sputtering unit to and releasing it from the cathode body such that a gap (14) is always maintained between the target unit (5,15,9,4) and the surrounding cathode body. The lever is pref. connected to the target unit via push rods (3) which move in ball bearing bushes (7). Seals (12,13) produce airtight seals between internal and external areas of the sputtering unit when the lever is in its tightened locking position. An adaptor ring (15) is used to locate the seals in position. The gap (14) is pref. approx. 1.5 mm. A guide bolt automatically connects the target to the power supply once the lever is in its tightened position. ADVANTAGE - The target can be rapidly and easily changed and the lever device takes up very little space. Once protruding downward beyond the cathode body, screw (6) can be released and the connection pins (5) together with the cooling body (9) and target (4) fall away.