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haiburitsudo optical Integrated Circuit device

机译:haiburitsudo光学集成电路器件

摘要

PURPOSE:To eliminate the need for a wire bonding process in which an electric IC and a light-emitting element are connected, and to prevent the increase of wiring capacitance by wire connections by forming a wiring metal in a region, in which a hole and an electric element are shaped, and die-bonding the light-emitting element onto the wiring metal formed in the hole. CONSTITUTION:A hole 7 is formed selectively in a region different from a region, in which an electric element is shaped, on an Si-IC wafer 1 to a tapered shape, and etched. The hole 7 with a tapered inclined plane is formed, and a semiconductor laser 2 is die-bonded on a wiring metal 4 shaped in the hole 7. The semiconductor laser 2 can easily be die-bonded in such a manner that solder layers such as Pb/Sn are formed previously on the surfaces of a p side electrode 24 and an n side electrode 23 on the semiconductor laser 2 and the semiconductor laser 2 is bonded onto the heated Si-IC wafer 1 by using the solder layers.
机译:用途:消除了连接电子IC和发光元件的引线键合工艺的需要,并通过在其中有孔和孔的区域中形成布线金属来防止由于引线连接而引起的布线电容的增加。形成电子元件的形状,并将发光元件芯片接合到形成在孔中的布线金属上。构成:在Si-IC晶片1上形成锥形的孔中,选择性地在不同于形成电子元件的区域的区域中形成孔7,并进行蚀刻。形成具有倾斜的斜面的孔7,并且将半导体激光器2芯片接合在形成于孔7中的布线金属4上。可以容易地以诸如焊料层之类的方式将半导体激光器2进行芯片接合。在半导体激光器2上的p侧电极24和n侧电极23的表面上预先形成Pb / Sn,并且通过使用焊料层将半导体激光器2接合到加热的Si-IC晶片1上。

著录项

  • 公开/公告号JPH071793B2

    专利类型

  • 公开/公告日1995-01-11

    原文格式PDF

  • 申请/专利权人 松下電器産業株式会社;

    申请/专利号JP19850162388

  • 发明设计人 大仲 清司;木村 荘一;

    申请日1985-07-23

  • 分类号H01L27/15;H01S3/18;

  • 国家 JP

  • 入库时间 2022-08-22 04:28:57

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