PURPOSE:To considerably shorten the time required for positioning based on monitor of optical coupling efficiency by leading out an electrode from a pickup which holds an optical element chip. CONSTITUTION:A manipulator 40 is provided with a pickup 41 which attracts and holds an optical element chip 4 at the front end, a pickup holder 42 which holds the base part of the pickup 41, and an arm part 43 whose front end the pickup holder 42 is fixed to, and the pickup 41 is provided in the front end part of the arm part 43 by a wire 47 for electric wiring and is connected to an electrode leading-out terminal. Since the electrode is led out from the pickup holding the optical element chip, the optical coupling efficiency between an optical waveguide and optical elements is monitored during the positioning process at the time of making optical elements into a hybrid optical integrated circuit even if these optical elements are not completely electrically wired and are in the bare chip state, and optical elements are positioned with a high precision and are fixed on a substrate.
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