PROBE SCANNING MECHANISM AND MEMORY DEVICE APPLYING SCANNING TYPE TUNNEL MICROSCOPE

摘要

PURPOSE: To provide a small-sized probe scanning mechanism characterized by a simple construction, a wide scanning range and a small size and the memory device applying the scanning type tunnel microscope. ;CONSTITUTION: This probe scanning mechanism has a container 15 for a vibration medium housing mercury 2 as the vibration medium in the container opened at its upper surface. A horizontally moving plate 1 horizontally movable in the mercury 2 is disposed near the one inner wall of this container 15 for the vibration medium. A driving circuit 18 for the horizontally moving plate for moving the horizontally moving plate 1 to a prescribed distance at a prescribed speed in a horizontal direction is connected to the horizontally moving plate 1. A perpendicularly moving plate 20 perpendicularly movable into the mercury 2 is disposed near the other inner wall of the container 15 for the vibration medium. A driving circuit 16 for the perpendicularly moving plate for perpendicularly moving the perpendicularly moving plate 2 into the mercury 2 is connected to the perpendicularly moving plate 20. A recording medium unit 31 is arranged to face the probe scanning mechanism above this mechanism, by which the memory device applying the scanning type tunnel microscope is realized.;COPYRIGHT: (C)1995,JPO