FORMATION OF FERROELECTRIC FILM BY SOL-GEL METHOD, MANUFACTURE OF CAPACITOR USING THE SAME, SOLUTION OF STARTING MATERIAL THEREFOR AND PREPARATION OF SOLUTION

摘要

PURPOSE: To form the ferroelectric film consisting of lead titanate zirconate by forming lead titanium double alkoxide and lead zirconium double alkoxide from a lead salt of fatty acid, titanium alkoxide and zirconium alkoxide. ;CONSTITUTION: This ferroelectric film is formed as follows: (1) Lead acetate trihydrate is diluted with an alcohol solvent and the resulting solution is boiled at about 120 to 180°C to remove the water of crystallization and to form lead acetate; (2) titanium isopropoxide is diluted with an alcohol solvent and the resulting solution is boiled at about 70 to 190°C to form titanium methoxyethoxide; (3) zirconium n-butoxide is diluted with an alcohol solvent and resulting solution is boiled at about 70 to 190°C to form zirconium methoxyethoxide; (4) the three products formed in the (1) to (3) are mixed together and boiled at about 120 to 200°C while using an alcohol solvent to form lead titanium dimethoxyethoxide and lead zirconium dimethoxyethoxide and further, the resulting compounds are subjected to hydrolysis and condensation to form the objective ferroelectric film consisting of lead titanate zirconate.;COPYRIGHT: (C)1995,JPO