The formation of a fine-patterned ferroelectric thin film from a sol-gel solution containing a photo-sensitive water-generator

摘要

A fine-patterned PZT film was successfully formed from a photo-sensitive sol-gel solution by means of UV-irradiation. This solution was prepared from lead acetate, zirconium n-butoxide, titanium i-propoxide, 2-methoxyethanol. O-nitrobenzyl alcohol (NBA) was used as a water-generator. Spin-coated PZT gel films on various substrates were irradiated with UV rays through a photo-mask pattern to facilitate hydrolysis reaction and developed with developer. The obtained pattern was a negative of the mask. The films were finally annealed for crystallization. The obtained films had perovskite structures and good electrical properties.